Quantum size effects in TiO₂ thin films grown by atomic layer deposition

• Massimo Tallarida,
• Chittaranjan Das and
• Dieter Schmeisser

Beilstein J. Nanotechnol. 2014, 5, 77–82, doi:10.3762/bjnano.5.7

• influenced by quantum size effects. The modified electronic properties may play an important role in charge carrier transport and separation, and increase the efficiency of energy conversion systems. Keywords: atomic layer deposition (ALD); charge transfer multiplet; covalency; energy conversion; quantum

• spectra were also observed in very thin TiO2 films that were grown by reactive evaporation in oxygen atmosphere at room temperature on SiO2 [18], Al2O3 [19] and MgO [20]. There, XAS spectra at the Ti-L2,3 absorption edge were analyzed within the charge-transfer multiplet (CTM) model. Within the CTM theory

• becomes clear that the same line shape can be simulated within the same theory framework (the charge-transfer multiplet) upon varying two different parameters, i.e., Slater integrals or ligand-field, which have a different physical meaning. While Soriano et al. [21] considered only the changes of ligand